Heyrovsky Institute of Physical Chemistry of the CAS, v. v. i.
Martin Jindra
+420606246890
martin.jindra@jh-inst.cas.cz
Dolejškova , 2155/3, Praha 8, 182 23
MicroWriter ML3 Pro (Durham MagnetoOptics Ltd.) is a direct-write photolithography machine for rapid prototyping in R&D laboratories and small clean rooms. It is compatible with most photolithography resists (385 nm), minimum feature size is 400 nm.
Martin Jindra
+420606246890
martin.jindra@jh-inst.cas.cz
Dolejškova , 2155/3, Praha 8, 182 23