Equipment detail - NanoEnviCz

Scanning Electron Microscope with Focused Ion Beam (UPOL17)

The Scanning Electron Microscope with Focused Ion Beam (SEM/FIB) is a multifunctional instrument for the observation and modification of surfaces, allowing the study of the morphology and topography of materials in the micrometric/nanometric range. SEM/FIB Scios 2 (ThermoFisher) is a high-resolution SEM with an accelerating voltage from 0.5 kV to 30 kV, equipped with a FEG electron source. The resolution of this microscope is 1 nm. This instrument can be used as a classical SEM. Information on size, shape, surface and external structure can be obtained from the SEM images. The Gas Injection System (GIS) allows localized deposition or etching of materials on the surface (Pt, C, W, H2O). The instrument is equipped with EDS for elemental analysis of samples. The instrument allows the preparation of TEM lamellas for samples of a wide range of materials.

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