Heyrovsky Institute of Physical Chemistry of the CAS, v. v. i.
Bláha Michal
+420266053856
michal.blaha@jh-inst.cas.cz
Dolejškova , 2155/3, Praha 8, 182 23
clean room (UFCH11)
The clean room is equipped with spin coater, mask aligner, oxygen plasma etcher, sputtering machine, thermal evaporator.