Heyrovsky Institute of Physical Chemistry of the CAS, v. v. i.
Kalbáč Martin
+420 26605 3804
martin.kalbac@jh-inst.cas.cz
Dolejškova , 2155/3, Praha 8, 182 23
clean room (UFCH11)
The clean room is equipped with spin coater, mask aligner, oxygen plasma etcher, sputtering machine, thermal evaporator.